Introduction

RSM in XRD stands for Reciprocal Space Mapping. It is a technique used to map the reciprocal space of crystals by varying the incident angle and azimuthal angle of the X-ray beam. By analyzing the intensity and position of the diffracted X-rays, RSM can provide information about the crystal's orientation, strain, lattice parameters, and defects. RSM is widely used in materials science, condensed matter physics, and semiconductor industry to study the properties and behavior of crystalline materials.

Representive Results

1. Reciprocal space mapping of VO2 films on TiO2 substrates with different thickness: (a) 1.6 nm; (b) 16.6 nm; (c) 24.2 nm; and (d) 74 nm.

Sample Requirement

1. Flat sample surface

2. The sample length should be at least 3-5 mm along the X-ray direction.

3. Maximum sample wafer around 4 inch

4. Maximum film thickness around 300nm.