Introduction

In SEM is an instrument for characterizing thenanomechanics properties of surfaces or structures. Itpresents sub nanometer resolution under the in-situvacuum environment of SEM or FIB. It is a tool used tostudy the mechanical properties of object surfaces orstructures.

Application range:

SEM/EBSD micropillar compression test to study theplasticity of single or dual crystal

1 SEM/EBSD micro tensile test to study theplasticity and stress-strain relationship of microsample.

2 SEM/EBSD micro cantilever test to study thefracture behavior of the micro sample.

3 SEM in-situ nanoindentation test.

4 SEM in-situ nanoscratch test.

Representive Results

1. SEM in-situ micropillar compression test

2. SEM in-situ micro particle compression test

Sample Requirement

Parallel polishing of the upper and lower surfaces, witha diameter not exceeding 30mm and a height notexceeding 20mm..